Ren-Sxyz100lr — Compact cryogenic XYZ flexure scanner

The Ren-Sxyz100lr is a compact cryogenic three-axis flexure scanner delivering 125 × 125 × 60 µm of travel at 300 K and 80 × 80 × 40 µm at 4 K in a 24 × 24 × 10 mm footprint. Non-magnetic and UHV compatible, designed for atomic force microscopy and confocal applications.

Specifications

SpecificationValue
TypeFlexure scanner (XYZ, motion amplified)
Scan Range125 × 125 × 60 µm (300 K) / 80 × 80 × 40 µm (4 K)
Footprint24 × 24 × 10 mm
ApplicationsAFM, confocal
MagneticNon-magnetic
VacuumUHV compatible
Body MaterialTitanium (standard) or BeCu (on request)

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